Growth kinetics and mechanisms of aluminum-oxide films formed by thermal oxidation of aluminum

The growth kinetics and mechanisms of thin aluminum-oxide films formed by the dry, thermal oxidation of a bare Al(431) substrate at a partial oxygen pressure of 1.33x10(-4) Pa in the temperature range of 373-773 K were studied using x-ray photoelectron spectroscopy. The initial oxidation of the bare Al substrate proceeds by an island-by-layer growth mechanism, involving the lateral diffusion over the bare Al substrate surface of mobile oxygen species. At low temperatures (Tless than or equal to573 K), an amorphous oxide film develops that attains a limiting (uniform) thickness. At high temperatures (T>573 K), growth is not impeded at a limiting thickness. Kinetic analysis established the occurrences of two different oxide-film growth regimes: an initial regime of very fast oxide-film growth and a second, much slower oxidation stage that is observed only at T>573 K. These results could be discussed in terms of electric-field controlled, interstitial, outward transport of Al cations through a close packing of O anions in the amorphous films, and inward diffusion of O along grain boundaries in the crystalline films, respectively. For the electric-field controlled Al cation motion, a value of 2.6 eV was determined for the rate-limiting energy barrier, which is located at the metal/oxide interface. This corresponds with a Mott potential of -1.6 V. (C) 2002 American Institute of Physics.