期刊
MICROSYSTEM TECHNOLOGIES
卷 8, 期 4-5, 页码 359-362出版社
SPRINGER-VERLAG
DOI: 10.1007/s00542-001-0160-8
关键词
-
An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10-150 mum and aspect ratios of 3-10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据