3.8 Article Proceedings Paper

Embossing of 3D ceramic microstructures

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MICROSYSTEM TECHNOLOGIES
卷 8, 期 4-5, 页码 359-362

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SPRINGER-VERLAG
DOI: 10.1007/s00542-001-0160-8

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An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10-150 mum and aspect ratios of 3-10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed.

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