A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition

Lithium phosphorus oxynitride (UPON) thin film as a lithium electrolyte was successfully prepared by ultraviolet (355 nm) pulsed laser deposition in an ambient N-2 gas for the first time. The ionic conductivity of the deposited LiPON film strongly depends on the laser fluence and the ambient N-2 gas pressure. AC impedance data of LiPON thin film were measured at different temperatures, and an ionic conductivity of 1.6 x 10(-6) S/cm at 25 degreesC was obtained with conductivity activation energy of 0.58 eV. The structure, composition and morphology of the deposited UPON films were characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis and X-ray photoelectron spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.