4.6 Article Proceedings Paper

Frontier of transparent conductive oxide thin films

期刊

VACUUM
卷 66, 期 3-4, 页码 419-425

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PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0042-207X(02)00165-3

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transparent oxide conductors; p-n junction; UV-LED; ITO; Ga2O3; CuInO2

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The recent advancement of transparent conductive oxide thin films is reviewed using our strategy. Topics focused are the lowest resistive indium tin oxide films, deep-ultraviolet (deep-UV) transparent conductive oxides (TCO) thin film, p-n homo junction based on bipolar CuInO2, and UV-light emitting diode based on p-n hetero-junction. A frontier of transparent oxide semiconductors is opening as a consequence of discovery of p-type TCO. (C) 2002 Elsevier Science Ltd. All rights reserved.

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