期刊
IEEE TRANSACTIONS ON MAGNETICS
卷 38, 期 5, 页码 2913-2915出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2002.803230
关键词
laser ablation technique; maximum energy products; Nd-Fe-B magnet; remanence
Nd-Fe-B film magnets were prepared by a laser ablation technique. The suppression of oxidation is a key point to obtain Nd-Fe-B film magnets with high coercivity. The following methods were used. 1) Ta substrates and a Ti sublimation pump as an auxiliary pump were used during deposition. 2) The composition of a target was set to Nd2.6Fe14B which included a larger amount of Nd compared with the stoichiometric composition of Nd2Fe14B. In addition, the distance between a target and a substrate was approximately 5 mm to ensure a high deposition rate. One-hour deposition using laser ablation technique enabled us to obtain Nd-Fe-B amorphous films with the thickness of approximately 50 mum. After annealing the films under an optimum condition, the coercivity and the remanence were more than 800 kA/m and approximately 0.6 T, respectively. In addition, the maximum energy product was 56 kJ/m(3).
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