期刊
SOLAR ENERGY MATERIALS AND SOLAR CELLS
卷 74, 期 1-4, 页码 339-349出版社
ELSEVIER
DOI: 10.1016/S0927-0248(02)00093-4
关键词
amorphous silicon; solar cells; tandem; germanium; high-rate deposition
This paper reviews recent progress in large-area a-Si/a-SiGe tandem solar cells at Sanyo. Optimized hydrogen dilution conditions for high-rate deposition of hydrogenated amorphous silicon (a-Si:H) films and thinner i-layer structures have been systematically investigated for improving both the stabilized efficiency and the process throughput. As a result, a high photosensitivity of 10(6) for a-Si:H films has been maintained up to the deposition rate of 15 Angstrom/s. Furthermore, the world's highest initial conversion efficiency of 11.2% which corresponds to a stabilized efficiency of about 10% has been achieved for a 8252 cm(2) a-Si/a-SiGe tandem solar cell by combining the optimized hydrogen dilution and other successful technologies. (C) 2002 Elsevier Science B.V. All rights reserved.
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