期刊
NANOTECHNOLOGY
卷 13, 期 5, 页码 686-690出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/13/5/330
关键词
-
We describe a fabrication process for devices with few quantum bits (qubits), which are suitable for proof-of-principle demonstrations of silicon-based quantum computation. The devices follow the Kane proposal of using the nuclear spins of P-31 donors in Si-28 as qubits, controlled by metal surface gates and measured using single-electron transistors (SETs). The of accurate registration P-31 donors to control gates and read-out SETs is achieved through the use of a self-aligned process which incorporates electron beam patterning, ion implantation and triple-angle shadow-mask metal evaporation.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据