期刊
THIN SOLID FILMS
卷 418, 期 2, 页码 182-188出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(02)00699-5
关键词
multilayers; stress; elastic properties; gallium arsenide
Thermal stresses in elastic multilayer systems have been previously modelled. However, because the displacement compatibility condition at interfaces between layers must be satisfied, the complexity in obtaining a closed-form solution increases with the number of layers in the system. As a result, existing analyses often adopt simplifications (e.g. assuming a constant elastic modulus throughout the system) to obtain closed-form solutions or are solved numerically by computer. The present study develops an analytical model, in which the complexity in obtaining a closed-form solution is independent of the number of layers and an exact closed-form solution can be concisely formulated. Specific results are calculated for elastic thermal stresses in (AlGa)As laser diodes, which consist of five layers. Also, the zero-order and the first-order approximations are formulated based on the exact closed-form solution, and their accuracy is examined. The acceptability of assuming a constant elastic modulus in the system in existing analyses is also discussed. (C) 2002 Elsevier Science B.V All rights reserved.
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