期刊
OPTICS AND LASER TECHNOLOGY
卷 34, 期 8, 页码 631-637出版社
ELSEVIER SCI LTD
DOI: 10.1016/S0030-3992(02)00069-5
关键词
Shack-Hartmann sensor; wavefront measuring; aspherics
Aspheric lenses and surfaces are increasingly used in modem high-quality optics. Therefore, new measuring methods for an accurate quantification of these aspheres are also necessary. The current approach to quantify aspheres is to apply null systems such as computer-generated holograms as a part of a null lens in a interferometer. An alternative to this method is the Shack-Hartmann wavefront sensor. The dynamic range of this sensor can be adjusted by the optical parameters of the applied microlens array. Hence, large wavefront aberrations can be measured directly without a null lens. However, there are basic limitations in the dynamic range of a Shack-Hartmann sensor (SHS) depending on the curvature of the incident wavefront. In this paper, an analytical expression to determine the strongest wavefront curvature which can be measured with a defined microlens array of an SHS is derived. It allows to calculate the microlens parameters required to measure the wavefront of a test lens. Particularly, the influence of rotational symmetric aspherical wavefront shapes to the dynamic range of an SHS has been studied. A comparison between interferometry and the SHS has been accomplished. Numerical solutions using scalar diffraction theory illustrate the analytical predictions. (C) 2002 Published by Elsevier Science Ltd.
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