Size determination of field-induced water menisci in noncontact atomic force microscopy

We have studied the dimensions of water capillaries formed by an applied electrical field between an atomic force microscope tip and a flat silicon surface. The lateral and vertical dimensions of the liquid meniscus are in the 5-30 nm range. The size depends on the duration and strength of the voltage pulse. It increases by increasing the voltage strength or the pulse duration. The meniscus size is deduced from the experimental measurement of the snap-off separation. These results are of special relevance to optimize local oxidation nanolithography. (C) 2002 American Institute of Physics.