期刊
ULTRAMICROSCOPY
卷 93, 期 3-4, 页码 199-212出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/S0304-3991(02)00277-2
关键词
ferroelectric; electron holography
类别
Ferroelectrics are increasingly important as materials in semiconductor technology, e.g. for building non-volatile memory chips, For optimisation of the properties of such devices, there is an urgent need for methods. which analyse the ferroelectric properties at nanometer scale. Furthermore. the basic understanding of the interaction of ferroelectrics with electrons in the transmission electron microscopy is still incomplete. It is shown that electron holography offers a promising way to understand and investigate ferroelectrics in the electron microscope. (C) 2002 Published by Elsevier Science B.V.
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