Toward a Miniature Wireless Integrated Multisensor Microsystem for Industrial and Biomedical Applications

This paper presents our work toward the integration of a multisensor microsystem with wireless communication, using system-on-chip (SoC) methodology. Four different forms of microelectronic sensors have been fabricated on two separate 5 x 5 mm(2) silicon chips measuring pH, conductivity, dissolved oxygen concentration, and temperature. The sensors are integrated with a sensor fusion chip comprising analog circuitry for sensor operation and signal amplification prior to digital decoding and transmission. The microsystem prototype will be packaged in a miniature capsule, which measures 16 mm x 55 mm including batteries and dissipates 6.3 mW for a minimal life cycle of 12 h.