期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 49, 期 12, 页码 2317-2322出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2002.805608
关键词
chemical detection; microdischarge; microplasma; water spectroscopy
This paper reports on the detection of trace contaminants in water by spectroscopy of micro glow discharges that operate in air or at moderate vacuum using liquid electrodes. A liquid electrode spectral emission chip (LEd-SpEC) has been developed to perform this function. The device is fabricated by a four mask process, and provides a reservoir and channels in a glass substrate, along with electrodes that bias the water sample. Liquid from the cathode is sputtered into the discharge, for spectroscopic detection of impurities. Using a commercial spectrometer, Na concentrations < 10 ppm, and Ph concentrations of 5 ppm, and Al and Cr concentrations of 10 ppm have been measured. The ratio of Na spectral intensity to that of ambient N-2 is shown to be a suitable measure of Na impurity concentration over several orders of magnitude. The addition of HNO3 to lower the pH of the liquid solution increases this ratio by almost an order of magnitude. By selectively doping the solution, the device can also be used as a customizable optical source for UV and visible wavelengths.
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