Capacitive-type humidity sensors fabricated using the offset lithographic printing process

This paper reports on the fabrication of a novel capacitive-type relative humidity sensor of which the electrode films are deposited using the high speed printing process, offset lithography. Parallel-plate capacitor sensor structures have been formed with a number of humidity sensitive polymers including polyimide and polyethersulphone (PES). Details of the fabrication process and sensor characteristics such as linearity, sensitivity and response time are included. (C) 2002 Elsevier Science B.V. All rights reserved.