期刊
IEEE SENSORS JOURNAL
卷 3, 期 1, 页码 102-107出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2003.810099
关键词
interferometry; micromachining; optical fiber; pressure measurement
Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describe miniature Fabry-Perot cavity pressure sensors constructed by micromachining techniques in a turbine test application. The sensor bodies are 500-mum squared, 300-mum deep with a similar to2-mum-thick copper diaphragm electroplated on one face. The sensor cavity is formed between the diaphragm and the cleaved end of a singlemode fiber sealed to the sensor by epoxy. Each sensor is addressed interferometrically in reflection by three wavelengths simultaneously, giving an unambiguous phase determination; a pressure sensitivity of 1.6 rad bar(-1) was measured, with a typical range of vacuum to 600 kPa. Five sensors were embedded in the trailing edge of a nozzle guide vane installed upstream of a rotor in a full-scale turbine stage transient test facility. Pressure signals in the trailing edge flow show marked structure at the 8-kHz blade passing frequency. To our knowledge, this is the first report of sensors located at the trailing edge of a normal-sized turbine blade.
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