期刊
IEEE ELECTRON DEVICE LETTERS
卷 24, 期 2, 页码 69-71出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2002.807709
关键词
carrier confinement; diffusion barrier; V-shaped confining potential well
A working p-type SiGe heterostructure field-effect transistor, utilizing a V-shaped confining potential well as the conducting channel, has been successfully fabricated. The upper boron delta-doping layer acts as a diffusion barrier to slow diffusion into the undoped Si cap layer. On the other hand, the bottom boron delta-doping layer prevents hot holes from escaping the channel by improving carrier confinement. It is found that when a V-shaped confining potential well is used as the conducting channel, the devices exhibit the excellent property not only of higher current density but also enhancement in extrinsic transconductance and linear operation range over a wider dynamic range than those of delta-doped devices for the same dose in SiGe conducting well. The measured transconductance is enhanced three to six times over that of the other delta cases.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据