FeCo-Zr-O nanogranular soft-magnetic thin films with a high magnetic flux density

Soft-magnetic thin films with high magnetic flux densities of about 23 kG have been fabricated in the (Fe-Co)-Zr-O nanogranular system. The films were prepared by reactive sputtering under an oxygen-argon atmosphere using a target of Fe-Co-Zr alloys. The microstructure was composed of base-centered-cubic Fe-Co nanograins, where nanoparticles of amorphous Zr oxide are dispersed. These Zr-oxide nanoparticles are thought to hinder the growth of Fe-Co grains during the film deposition, causing low coercivity. (C) 2003 American Institute of Physics.