期刊
JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 21, 期 3, 页码 634-642出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2003.811792
关键词
electromechanical effects; microactuators; microassembly; micromachining; mirrors; optical device fabrication; optical fiber switches
This paper, describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 x 256-and 1024 x 1024-port large optical, cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OCX fabrics.
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