期刊
PLASMA CHEMISTRY AND PLASMA PROCESSING
卷 23, 期 1, 页码 1-46出版社
SPRINGER
DOI: 10.1023/A:1022470901385
关键词
dielectric-barrier discharges; silent discharges; non-equilibrium plasmas; ozone synthesis; pollution control; surface treatment; CO2 lasers; excimer lamps; plasma displays
Dielectric-barrier discharges (silent discharges) are used on a large industrial scale. They combine the ad antages of non-equilibrium plasma properties with the ease of atmospheric-pressure operation. A prominent feature is the simple scalability from small laboratory reactors to large industrial installations with megawatt input powers. Efficient and cost-effective all-solid-state power supplies are available. The preferred frequency range lies between 1 kHz and 10 MHz, the preferred pressure range between 10 kPa and 500 kPa. Industrial applications include ozone generation, pollution control, surface treatment, high power CO2 lasers, ultraviolet excimer lamps, excimer based mercury-free fluorescent lamps, and flat large-area plasma displays. Depending on the application and the operating conditions the discharge can ha e pronounced filamentary structure or fairly diffuse appearance. History, discharge physics, and plasma chemistry of dielectric-barrier discharges and their applications are discussed in detail.
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