期刊
JOURNAL OF SYNCHROTRON RADIATION
卷 10, 期 -, 页码 168-171出版社
BLACKWELL MUNKSGAARD
DOI: 10.1107/S0909049502019532
关键词
X-ray optics; focusing; X-ray free-electron lasers; reactive-ion etching
The fabrication and testing of planar refractive hard X-ray lenses made from bulk CVD diamond substrates is reported. The lens structures were generated by electron-beam lithography and transferred by reactive-ion etching into the diamond. Various lens designs were fabricated and tested at 12.4 and 17.5 keV photon energy. Efficiencies of up to 71% and gains of up to 26 were achieved. A line focus of 3.2 mum (FWHM) was measured. These lenses should be able to withstand the extreme flux densities expected at the planned fourth-generation X-ray sources.
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