Arrays of electrical devices with each comprising multiple single-walled carbon nanotubes (SWNT) bridging metal electrodes are obtained by chemical vapor deposition (CVD) of nanotubes across prefabricated electrode arrays. The ensemble of nanotubes in such a device collectively exhibits large electrical conductance changes under electrostatic gating, owing to the high percentage of semiconducting nanotubes. This leads to the fabrication of large arrays of low-noise electrical nanotube sensors with 100% yield for detecting gas molecules. Polymer functionalization is used to impart high sensitivity and selectivity to the sensors. Polyethyleneimine coating affords n-type nanotube devices capable of detecting NO2 at less than 1 ppb (parts-per-billion) concentrations while being insensitive to NH3. Coating Nafion (a polymeric perfluorinated sulfonic acid ionomer) on nanotubes blocks NO2 and allows for selective sensing of NH3. Multiplex functionalization of a nanotube sensor array is carried out by microspotting. Detection of molecules in a gas mixture is demonstrated with the multiplexed nanotube sensors.
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