期刊
APPLIED SURFACE SCIENCE
卷 208, 期 -, 页码 153-158出版社
ELSEVIER
DOI: 10.1016/S0169-4332(02)01358-2
关键词
micro-electromechanical devices; micro-machining; laser chemistry applications; laser machining; laser materials-processing applications
Two-photon absorption (TPA) has been a useful tool in spectroscopy. With the progress of laser technologies, excitation of various photochemical and physical reactions by two or multiphoton processes becomes essential for advanced microscopic imaging, nano-spectroscopy and laser materials processing. In our research, we use TPA to excite local photopolymerization of resins, by which various photonic and micro-mechanical devices and systems have been produced. In this paper, we will summarize our recent progresses including: improvement of three-dimensional (3D) spatial resolutions and their characterization by an ascending scan method, a strategy of shortening fabrication duration, and a 3D micro-diagnosis technology. (C) 2002 Published by Elsevier Science B.V.
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