期刊
THIN SOLID FILMS
卷 429, 期 1-2, 页码 282-285出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(02)01330-5
关键词
transmission electron microscopy; interfacial defect layer; barium strontium titanate; high-density storage
Barium strontium titanate (Ba,Sr)TiO3 (BST) thin-films on Pt-substrates were studied by transmission electron microscopy. The films show a columnar structure with the grains of 10-50 nm in diameter. These are oriented parallel to the [0 0 1] direction which in turn is parallel to the film growth direction. No amorphous intergrain regions occur. The high-resolution lattice fringe pictures show for the first time that over horizontally extended areas of the interface the lattice of the BST film is modified by the introduction of a defect layer. This observation is discussed in terms of a structural origin of the so-called dead-layer effect responsible for a reduction of the film permittivity with decreasing foil thickness. (C) 2003 Elsevier Science B.V. All rights reserved.
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