4.4 Article Proceedings Paper

Fabrication and characterization of anodic aluminum oxide template

期刊

MICROELECTRONIC ENGINEERING
卷 66, 期 1-4, 页码 166-170

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(03)00042-X

关键词

AAO template; pore-widening time; AFM

向作者/读者索取更多资源

In this paper, anodic aluminum oxide (AAO) templates were fabricated using a two-step oxidization method, pore-widening was then fulfilled in 5 wt% phosphoric acid at 37 degreesC. The AAO template prepared under 40 V constant potential presents the optimum ordering. The pore diameter and spacing are proportional to the forming voltage, which is due to the alternative migration velocity of reactive ions under electric field according to the growth-dissolution model. Further pore adjustment depends on the time of pore-widening in phosphoric acid. The characterization of the AAO template was measured by atomic force microscopy (AFM) and X-ray diffraction (XRD). (C) 2003 Elsevier Science B.V. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.4
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据