期刊
SYNTHETIC METALS
卷 135, 期 1-3, 页码 741-742出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0379-6779(02)00827-5
关键词
etching; graphite and related compounds; carbon nanotubes; cold glow plasma
Cold glow air plasma was used to remove the peaks of the tips of the well-aligned arrays of carbon nanotubes (CNTs) in a controlled, uniform manner. The process can be performed at about 0.1 micron/min rate without significant destruction of the bottom of CNTs. This approach night be applied to different physico-chemical modifications of the peaks of CNTs tips and removal of the peaks containing catalyst nanoparticles and/or other impurities as well as to leveling of the CNTs arrays.
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