期刊
APPLIED PHYSICS LETTERS
卷 82, 期 15, 页码 2485-2487出版社
AMER INST PHYSICS
DOI: 10.1063/1.1566803
关键词
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Fabrication of field emitters by the radio-frequency plasma-enhanced chemical vapor deposition of vertically aligned carbon nanotubes (CNT) on soda-lime glass is reported. CNT was produced at 400 degreesC by the control of the collision energy of carbonic cations to a substrate through a dc bias voltage. The CNTs produced in this work were of a cup-stacked type and had catalyst particles on the top. The CNT emitters formed by our method were integrated into triode-type microcathodes and showed field-emission properties suitable for display applications. (C) 2003 American Institute of Physics.
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