期刊
APPLIED PHYSICS LETTERS
卷 82, 期 15, 页码 2491-2493出版社
AMER INST PHYSICS
DOI: 10.1063/1.1566791
关键词
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We report a bottom-up approach to integrate multiwalled carbon nanotubes (MWNTs) into multilevel interconnects in silicon integrated-circuit manufacturing. MWNTs are grown vertically from patterned catalyst spots using plasma-enhanced chemical vapor deposition. We demonstrate the capability to grow aligned structures ranging from a single tube to forest-like arrays at desired locations. SiO2 is deposited to encapsulate each nanotube and the substrate, followed by a mechanical polishing process for planarization. MWNTs retain their integrity and demonstrate electrical properties consistent with their original structure. (C) 2003 American Institute of Physics.
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