4.7 Article

Porous silicon microcavities for optical hydrocarbons detection

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SENSORS AND ACTUATORS A-PHYSICAL
卷 104, 期 2, 页码 179-182

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ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(03)00057-8

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porous silicon; optical sensors; microcavities; low-dimensional silicon structure

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Large, repeatable and selective red-shifts in the reflectivity spectra of porous silicon microcavities (PSMs) have been registered after exposure to vapour or dip into liquid aliphatic hydrocarbons with different molecular weights. The shift in the resonant peak of the optical microcavity is due to average refractive index changes, induced by capillary condensation of the organic species into the silicon pores. (C) 2003 Elsevier Science B.V. All rights reserved.

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