期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 42, 期 4B, 页码 L435-L437出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.42.L435
关键词
ozone sensors; oxide semiconductors; ZnO thin films; nanostructured oxides
In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.
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