期刊
THIN SOLID FILMS
卷 431, 期 -, 页码 63-67出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(03)00196-2
关键词
chemical vapour deposition; chalcopyrite; thin-film technology; solar cells
The development of thin-film solar cells on flexible, lightweight, space-qualified substrates provides an attractive cost solution to fabricating solar arrays with high specific power (W/kg). Thin-film fabrication studies demonstrate that ternary single source precursors can be used in either a hot, or cold-wall spray chemical vapour deposition reactor, for depositing CuInS2, CuGaS2 and CuGaInS2 at reduced temperatures (400-450 degreesC), which display good electrical and optical properties suitable for photovoltaic devices. X-ray diffraction studies, energy dispersive spectroscopy and scanning electron microscopy confirmed the formation of the single phase CIS, CGS, CIGS thin-films on various substrates at reduced temperatures. (C) 2003 Elsevier Science B.V. All rights reserved.
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