期刊
APPLIED SURFACE SCIENCE
卷 212, 期 -, 页码 255-263出版社
ELSEVIER
DOI: 10.1016/S0169-4332(03)00106-5
关键词
TiO2 thin films; sputtering; XRD; TEM; SE; optical band gap
Titanium dioxide films with the anatase and rutile single phase were formed on Si substrates by rf sputtering through a precise control of critical parameters. The structure of the films was studied by X-ray diffraction (XRD) and transmission electron microscopy (TEM), and the optical properties were evaluated with spectroscopic ellipsometry (SE). Lattice distortion was found in both anatase and rutile films from TEM observation. The obtained refractive indices n exhibit higher values than those reported for thin films due presumably to the density structure of the sputtered films. Optical band gaps were calculated by Tauc plot using the obtained extinction coefficient separately for anatase and rutile, with values larger than those reported for bulk materials. The reasons for the larger band gap might be due to the strain from lattice distortion. (C) 2003 Elsevier Science B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据