期刊
SURFACE SCIENCE
卷 531, 期 2, 页码 185-198出版社
ELSEVIER
DOI: 10.1016/S0039-6028(03)00492-8
关键词
nitrides; graphite; ion bombardment; X-ray photoelectron spectroscopy; Raman scattering spectroscopy; secondary ion mass spectroscopy
Amorphous carbon nitride (CNx) thin layer, formed by the keV N-2(+) irradiation of highly oriented pyrolytic graphite, has been investigated using X-ray photoelectron and raman spectroscopies, and time-of-flight secondary ion mass spectrometry. C1s X-ray photoelectron spectroscopy (XPS) peak separations indicate that C-N bonds form over and above the graphite fragmentation previously obtained on Ar+ irradiation. N1s XPS peak separations indicate three components. Their attributions, and the resultant CNx structure, are confirmed by angle-resolved XPS and TOF-SIMS analyses. (C) 2003 Elsevier Science B.V. All rights reserved.
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