期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
卷 42, 期 6B, 页码 4107-4110出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.42.4107
关键词
focused ion beam (FIB); chemical vapor deposition (CVD); nozzle nanostructure; bio injector; glass capillary
Three-dimensional nanostructures on a glass capillary have a number of useful applications such as manipulators and sensors in the various micro structures. This time, we have demonstrated the fabrication of a nozzle nanostructure on a glass capillary for a bio injector by 30 keV Ga+ focused-ion-beam assisted deposition with a precursor of phenanthrene vapor and etching. It has been demonstrated that nozzle nanostructures with various shapes and sizes have been successfully fabricated. An inner tip diameter of 30 nm on a glass capillary and a tip shape with an inclined angle have been realized.
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