Array of micromachined components fabricated using micro-origami method

A two-dimensional array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called micro-origami. The array is fabricated by epitaxial growth of III-V multilayers on GaAs substrates followed by photolithography and wet etching. The structures move to their final position during the process. Future applications of micromachined structures obtained by this method are discussed.