Parameters extraction and Modeling for planar spiral inductor on Si-SiO2 substrates by DDM for conformal modules

In this paper, the domain decomposition method (DDM) for conformal modules is used to get simple analytic expressions for parameters of planar spiral inductors on Si-SiO2 substrates. The conductor and substrate losses are considered in the expressions. The quality factor of the spiral inductor is computed with a transmission-line mode and compared with previously published experimental results, showing that DDM model is accurate and efficient for modeling an on-chip spiral inductor On Si-SiO2 substrates.