期刊
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
卷 51, 期 6, 页码 1763-1766出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMTT.2003.812581
关键词
conformal module; domain decomposition method (DDM); planar spiral inductors; quality factor
In this paper, the domain decomposition method (DDM) for conformal modules is used to get simple analytic expressions for parameters of planar spiral inductors on Si-SiO2 substrates. The conductor and substrate losses are considered in the expressions. The quality factor of the spiral inductor is computed with a transmission-line mode and compared with previously published experimental results, showing that DDM model is accurate and efficient for modeling an on-chip spiral inductor On Si-SiO2 substrates.
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