期刊
SURFACE SCIENCE
卷 532, 期 -, 页码 1140-1144出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/S0039-6028(03)00196-1
关键词
electron microscopy; laser methods; photoelectron spectroscopy; surface electronic phenomena (work function; surface potential, surface states, etc.)
The lateral resolution of our laser-based microspot photoemission spectrometer [Surf. Sci. 507-510 (2002) 434] has been improved to 0.3 mum by focusing VUV light of 140 nm wavelength (8.9 eV photon energy). The VUV light is generated by frequency tripling a second-harmonic output of a regeneratively amplified titanium: sapphire laser of 250 kHz repetition rate, and is focused on a sample surface by a Schwarzschild objective of 0.29 NA. Time-of-flight (TOF) photoelectron spectra of energy resolution better than 40 meV are accumulated for 0.4 s during scanning the sample position by 0.1 mum/step. Measurement on a Ta-striped Si sample revealed that the lateral resolution is 0.3 mum, which is very close to the diffraction-limited spot diameter. The present microspectrometer is characterized with the simultaneous realization of the diffraction-limited lateral resolution and the high-energy resolution, which is close to the Fourier transform of the pulse width of the laser light (100 fs). (C) 2003 Elsevier Science B.V. All rights reserved.
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