期刊
APPLIED SURFACE SCIENCE
卷 215, 期 1-4, 页码 209-213出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/S0169-4332(03)00284-8
关键词
carbon nanotubes (CNT); microwave plasma chemical vapor deposition (MP-CVD); catalytic growth; field emission; emitter
The carbon nanotubes (CNTs) were grown successfully on the surface of various substrates by microwave plasma chemical vapor deposition (MP-CVD). The substrates investigated included insulator substrates (glass, ceramic, and sapphire), semiconductor substrates (Si), metal thin film substrates (Cr, Ni, etc.), and the metal surface of stainless steel plates. We found that the first three kinds of substrates needed to be coated with Fe catalytic particles, but the metal surface of stainless steel plates was able to be in no catalyst condition. Main technologies, results and initial application of field emission are given. (C) 2003 Elsevier Science B.V. All rights reserved.
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