期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 13, 期 4, 页码 S103-S107出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/13/4/317
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Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabrication of the test devices. The pressure sensor membrane is a thin polyimide sheet bonded to a silicon wafer and the sensing material is sputtered ZnO piezoelectric thin film. The fabricated liquid flow sensor has been tested with a piezoelectric micropump for flow rates from 30 mul h(-1) to 300 mul h(-1). Stroke volumes of 1 to 10 nl have been measured. The strain in the sensing layer has been modeled and a transverse piezoelectric coefficient of e(31,f) = -0.294 C m(-2) has been extracted.
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