Fabrication and characterization of microinductors for distributed power converters

Inductors play a key role in dc-dc converters, but few options exist for implementing on-chip inductors for highly miniaturized, monolithic power converters. Microinductors constructed by standard microelectronic fabrication techniques with magnetic films as the core material have been investigated during the past 20 years with mixed results. A 13-mm(2) microinductor based on a spiral geometry and having L = 3.2 muH and Q = 1.3 at 1 MHz is reported here. Key issues regarding microinductor design and performance are discussed.