Fabrication and coupling to planar high-Q silica disk microcavities

Using standard lithographic techniques, we demonstrate fabrication of silica disk microcavities, which exhibit whispering-gallery-type modes having quality factors (Q) in excess of 1 million. Efficient coupling (high extinction at critical coupling and low, nonresonant insertion loss) to and from the disk structure is achieved by the use of tapered optical fibers. The observed high Q is attributed to the wedged-shaped edge of the disk microcavity, which is believed to isolate modes from the disk perimeter and thereby reduce scattering loss. The mode spectrum is measured and the influence of planar confinement on the mode structure is investigated. We analyze the use of these resonators for very low loss devices, such as add/drop filters. (C) 2003 American Institute of Physics.