期刊
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
卷 16, 期 3, 页码 501-510出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TSM.2003.815201
关键词
dispatching; scheduling; semiconductor manufactoring; wafer fabrication
In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using this new approach show significant improvement versus the use of a single dispatching criterion.
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