4.7 Article

Fabrication of p-type conductivity in SnO2 thin films through Ga doping

期刊

JOURNAL OF ALLOYS AND COMPOUNDS
卷 622, 期 -, 页码 644-650

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2014.10.003

关键词

P-type oxide semiconductor; Tin oxide; Sol-gel spin coating; Electrical properties; p-n junction

资金

  1. Ministry of Science and Technology of Taiwan [NSC 99-2221-E-035-034-MY3, NSC 102-2221-E-035-017]

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P-type transparent tin oxide (SnO2) based semiconductor thin films were deposited onto alkali-free glass substrates by a sol-gel spin-coating method using gallium (Ga) as acceptor dopant. In this study, we investigated the influence of Ga doping concentration ([Ga]/[Sn] + [Ga] = 0%, 5%, 10%, 15%, and 20%) on the structural, optical and electrical properties of SnO2 thin films. XRD analysis results showed that dried Ga-doped SnO2 (SnO2:Ga) sol-gel films annealed in oxygen ambient at 520 degrees C for 1 h exhibited only the tetragonal rutile phase. The average optical transmittance of as-prepared thin film samples was higher than 87.0% in the visible light region; the optical band gap energy slightly decreased from 3.92 eV to 3.83 eV with increases in Ga doping content. Hall effect measurement showed that the nature of conductivity of SnO2:Ga thin films changed from n-type to p-type when the Ga doping level was 10%, and when it was at 15%, Ga-doped SnO2 thin films exhibited the highest mean hole concentration of 1.70 x 10(18) cm(-3). Furthermore, a transparent p-SnO2:Ga (Ga doping level of 15%)/n-ZnO:Al (Al doping level of 2%) heterojunction was fabricated on alkali-free glass. The I-V curve measurement for the p-n heterojunction diode showed a typical rectifying characteristic with a forward turn-on voltage of 0.65 V. (C) 2014 Elsevier B.V. All rights reserved.

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