Water-soluble polymer templates are replicated from surface patterns by spin-casting a poly(vinyl alcohol) film-forming solution that undergoes a room-temperature evaporation process to solidify in less than 1 min with lateral resolution of sub-100 nm. The patterned polymer templates are deposited with metal and coupled to substrate surfaces by methods that may include photocurable materials, two-component reaction systems, or direct bonding without an intervening adhesion layer. Water is used to dissolve the flexible polymer templates at the conclusion of the transfer process.
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