期刊
IEEE SENSORS JOURNAL
卷 3, 期 5, 页码 652-657出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2003.817166
关键词
integrated optics; microsensors; optical waveguides
This paper reports on an integrated refractometer sensor, useful for measuring chemical quantities, based on antiresonant reflecting optical waveguides (ARROWs). We show that, by a suitable design, the attenuation in ARROW waveguides can strongly depend on the refractive index of the superstrate layer. We use this property to design and,realize an integrated refractometer. The proposed sensor structure is unique in that it consists in the ARROW waveguide itself acting like a vertical interferometer. The device is fabricated using standard silicon technology, fully compatible with bipolar and CMOS integrated circuit process. The measurement results show a sensing resolution of Deltan = 6e - 4 when used in a solution with a refractive index of 1.4600.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据