期刊
JOURNAL OF APPLIED PHYSICS
卷 94, 期 8, 页码 5333-5336出版社
AMER INST PHYSICS
DOI: 10.1063/1.1610777
关键词
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Closed-form estimate of curvature for hinged multilayer structures with initial strains is developed. The finite element method is used for modeling of self-positioning microstructures. The geometrically nonlinear problem with large rotations and large displacements is solved using step procedure with node coordinate update. Finite element results for curvature of the hinged micromirror with variable width is compared to closed-form estimates. (C) 2003 American Institute of Physics.
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