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Growth of cubic InN on r-plane sapphire

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APPLIED PHYSICS LETTERS
卷 83, 期 17, 页码 3468-3470

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AMER INST PHYSICS
DOI: 10.1063/1.1622985

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InN has been grown directly on r-plane sapphire substrates by plasma-enhanced molecular-beam epitaxy. X-ray diffraction investigations have shown that the InN layers consist of a predominant zinc blende (cubic) structure along with a fraction of the wurtzite (hexagonal) phase which content increases with proceeding growth. The lattice constant for zinc blende InN was found to be a=4.986 Angstrom. For this unusual growth of a metastable cubic phase on a noncubic substrate an epitaxial relationship was proposed where the metastable zinc blende phase grows directly on the r-plane sapphire while the wurtzite phase arises as the special case of twinning in the cubic structure. (C) 2003 American Institute of Physics.

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