期刊
APPLIED PHYSICS LETTERS
卷 83, 期 18, 页码 3647-3649出版社
AMER INST PHYSICS
DOI: 10.1063/1.1622800
关键词
-
Micromirrors were fabricated by the micro-origami technique. This technique allows the fabrication of simple and robust hinges for movable parts, and it can be applied to any pair of lattice mismatched epitaxial layers, in semiconductors or metals. A multilayer structure, including AlGaAs/GaAs component layers and an InGaAs strained layer, was grown by molecular beam epitaxy on a GaAs substrate. After definition of the hinge and mirror's shape by photolithography, the micromirrors were released from the substrate by selective etching. They moved to their final position powered by the strain release in the InGaAs layer. Optical actuation was achieved by irradiation with the 488 nm line of an argon laser, and the mirror's position was measured by sensing the reflection of a He-Ne laser. Continuous wave irradiation with a power density of 450 mW/mm(2) produced an angular deflection of the mirror of around 0.5degrees. The frequency response of the mirrors shows a resonance at 25 kHz. (C) 2003 American Institute of Physics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据