期刊
MACROMOLECULAR RAPID COMMUNICATIONS
卷 25, 期 2, 页码 441-444出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/marc.200300045
关键词
enzymes; oxidative polymerizations; photoresists; polyphenols
New positive-type photoresist systems based on enzymatically synthesized polyphenols have been developed. The photoresist thin film consisting of the polyphenol and a diazonaphthoquinone derivative was prepared on copperfoil-coated epoxy resins and exposed to UV light with different doses. The polyphenols from the bisphenol monomers exhibited high photosensitivity, comparable with a conventional cresol novolac. The sensitivity could be controlled by changing the structure of the polyphenols. Furthermore, the present photoresist showed excellent etching resistance.
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