期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 16, 期 2, 页码 368-370出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2003.821085
关键词
single mode; surface relief; vertical-cavity surface-emitting laser (VCSEL)
A single fundamental-mode output power of 6.5 mW was achieved from an 850-nm vertical-cavity surface-emitting laser (VCSEL) with a shallow surface relief, the highest single-mode power ever reported using this technique. The VCSELs were fabricated from epitaxial material grown to yield an antiphase reflection from the topmost layer. A circular surface relief, acting as a mode discriminator, was etched in the center to reduce the mirror loss for the fundamental mode. This inverted surface-relief technique offers relaxed etch depth control and, therefore, improves reproducibility and yield.
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