期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 14, 期 2, 页码 220-225出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/14/2/008
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In this paper we describe an experimental method and an analytical model for characterizing the surface energy inside a microchannel of micrometer size by measuring the marching velocity or position of a capillary meniscus. This method is based on the fact that the force summation of the meniscus surface tension and the filling reservoir gravitation might produce a pressure to pull liquid into the channel, and the marching velocity or the instantaneous position of the meniscus is related to the surface energy. Both parylene and silicon-nitride microchannels with different surface conditions were fabricated to perform the fill-in experiments subject to different liquids. It is shown that our model agrees well with the experimental data and is a valid method.
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